High-speed vacuum evaporation of large-area targets by a focused electron beam


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Abstract

A method of electron-beam evaporation of a target in a vacuum of ~10–2 Pa is considered. Initially, a focused electron beam spot moves at the periphery of the target in a circular path with an angular velocity of 8–80 rad/s by means of a ring sweep in the frequency range of 50–500 Hz. Then, by radial displacement with a linear velocity of 10–100 mm/s, the spot is guided over a spiral path from the edge of the target to its center. Due to spiral scanning, the spot runs across the entire target surface with a much larger area in 0.1–1.0 s and rapidly vaporizes the target.

About the authors

A. P. Semenov

Institute of Physical Materials Science, Siberian Branch

Author for correspondence.
Email: semenov@ipms.bscnet.ru
Russian Federation, Ulan-Ude, 670047 Republic of Buryatia

I. A. Semenova

Institute of Physical Materials Science, Siberian Branch

Email: semenov@ipms.bscnet.ru
Russian Federation, Ulan-Ude, 670047 Republic of Buryatia

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