High-speed vacuum evaporation of large-area targets by a focused electron beam

Abstract

A method of electron-beam evaporation of a target in a vacuum of ~10^–2 Pa is considered. Initially, a focused electron beam spot moves at the periphery of the target in a circular path with an angular velocity of 8–80 rad/s by means of a ring sweep in the frequency range of 50–500 Hz. Then, by radial displacement with a linear velocity of 10–100 mm/s, the spot is guided over a spiral path from the edge of the target to its center. Due to spiral scanning, the spot runs across the entire target surface with a much larger area in 0.1–1.0 s and rapidly vaporizes the target.