Generators of diffuse plasma at atmospheric pressure

Abstract

Devices that form low-temperature diffuse nanosecond-discharge plasma in a flow of various gases at the atmospheric pressure are described. To form diffuse plasma, negative voltage pulses with an amplitude of several tens of kilovolts and a duration of 5 ns were fed to a point–plane gap in the pulse–periodic mode. By varying the geometry of the discharge gap, the shape of the cathode, and the composition of the working gas, it is possible to obtain plasma with a wide range of parameters and modify the surfaces of various materials with areas of up to several tens of square centimeters.