Influence of the parameters of plasma-induced decomposition of tetramethylsilane on the chemical and phase compositions and particle size of resulting silicon carbide
- 作者: Berestenko V.I.1, Kurkin E.N.2, Torbov V.I.1, Domashnev I.A.2
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隶属关系:
- Institute of Problems of Chemical Physics
- Scientific Center
- 期: 卷 50, 编号 3 (2016)
- 页面: 221-223
- 栏目: Short Communications Plasma Chemistry
- URL: https://bakhtiniada.ru/0018-1439/article/view/156974
- DOI: https://doi.org/10.1134/S0018143916030036
- ID: 156974
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作者简介
V. Berestenko
Institute of Problems of Chemical Physics
编辑信件的主要联系方式.
Email: vib@icp.ac.ru
俄罗斯联邦, Chernogolovka, Moscow oblast
E. Kurkin
Scientific Center
Email: vib@icp.ac.ru
俄罗斯联邦, Chernogolovka, Moscow oblast
V. Torbov
Institute of Problems of Chemical Physics
Email: vib@icp.ac.ru
俄罗斯联邦, Chernogolovka, Moscow oblast
I. Domashnev
Scientific Center
Email: vib@icp.ac.ru
俄罗斯联邦, Chernogolovka, Moscow oblast
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