Author Details
Rumyantsev, Yu. M.
| Issue | Section | Title | File |
| Vol 50, No 3 (2016) | Plasma Chemistry | Chemical composition and properties of films produced from hexamethyldisilazane by plasma-enhanced chemical vapor deposition | |
| Vol 50, No 3 (2016) | Short Communications Plasma Chemistry | Plasma-chemical synthesis of transparent dielectric Si–C–O–H films from trimethylphenoxysilane |