Influence of the surface morphology of aluminum foil on the probability of heterogeneous recombination of О(3Р) atoms in oxygen plasma

详细

The process of recombining oxygen atoms on the surface of an aluminum foil and thin film is investigated in the positive column of the DC glow discharge in oxygen at a gas pressure of 200 Pa, a discharge current of 50 mA, and surface temperatures of 350–530 K. It is shown that an increase in the average surface roughness leads to a decrease of the probability of the heterogeneous recombination of O(³P) atoms. The values of the apparent activation energy for the process of heterogenic recombination of oxygen atoms are calculated.