Отправить статью по E-mail Peculiarities of the Structure and Properties of Thin PZT Films with Strongly Nonuniform Depth–Composition Profiles
- Авторы: Dolgintsev D.M.1, Staritsyn M.V.1,2, Pronin V.P.1, Kaptelov E.Y.1,3, Senkevich S.V.1,3, Pronin I.P.1,3, Nemov S.A.4
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Учреждения:
- A.I. Herzen State Pedagogical University of Russia
- I.V. Gorynin Central Research Institute of Structural Materials Prometey, National Research Center Kurchatov Institute
- Ioffe Physical Technical Institute, Russian Academy of Sciences
- Peter the Great St. Petersburg Polytechnic University
- Выпуск: Том 45, № 8 (2019)
- Страницы: 839-842
- Раздел: Article
- URL: https://bakhtiniada.ru/1063-7850/article/view/208407
- DOI: https://doi.org/10.1134/S1063785019080200
- ID: 208407
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Аннотация
Two-layer thin films of lead zirconate titanate (PZT) with lead content in the layers differing by 20% were deposited by RF magnetron sputtering at variable working gas pressure in the system. The phase states, compositions, and dielectric properties of two-layer films obtained with different orders of layer deposition were compared. It is established that the order of deposition significantly influences the conditions of crystallization of the perovskite phase and unipolar properties of PZT films.
Об авторах
D. Dolgintsev
A.I. Herzen State Pedagogical University of Russia
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 191186
M. Staritsyn
A.I. Herzen State Pedagogical University of Russia; I.V. Gorynin Central Research Institute of Structural Materials Prometey, National Research Center Kurchatov Institute
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 191186; St. Petersburg, 191015
V. Pronin
A.I. Herzen State Pedagogical University of Russia
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 191186
E. Kaptelov
A.I. Herzen State Pedagogical University of Russia; Ioffe Physical Technical Institute, Russian Academy of Sciences
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 191186; St. Petersburg, 194021
S. Senkevich
A.I. Herzen State Pedagogical University of Russia; Ioffe Physical Technical Institute, Russian Academy of Sciences
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 191186; St. Petersburg, 194021
I. Pronin
A.I. Herzen State Pedagogical University of Russia; Ioffe Physical Technical Institute, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 191186; St. Petersburg, 194021
S. Nemov
Peter the Great St. Petersburg Polytechnic University
Email: Petrovich@mail.ioffe.ru
Россия, St. Petersburg, 195251
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