Characterization of the Properties of Barium–Strontium Titanate Films and Controlled Elements Based on Them in the Frequency Range of 1–60 GHz

Аннотация

The electrical properties of barium–strontium titanate films and tunable capacitors based on them are studied in a wide frequency range. The dielectric losses in ferroelectric films at frequencies up to 30 GHz are estimated based on the parameters of capacitors measured using various resonance techniques. Direct measurements of the properties of the films were carried out at a frequency of 60 GHz using the open-resonator technique. Based on the comparison with semiconductor analogues, the prospects of using thin-film ferroelectric elements in the millimeter-wavelength range are shown.