Microhardness and Crack Resistance of Gallium Oxide

Abstract

The microhardness and crack resistance of two main gallium oxide polytypes: metastable α-Ga₂O₃ with a corundum structure and β-Ga₂O₃ (high-temperature phase) with a monoclinic crystal structure, have been studied using a Vickers method of diamond pyramid indentation. As far as we know, this is the first attempt to compare the mechanical properties of the two polytypes of gallium oxide.