Investigation of the Modified Structure of a Quantum Cascade Laser

Толық мәтін

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Аннотация

The process of obtaining a modified structure for quantum cascade lasers is studied; this process includes growth using molecular-beam epitaxy, plasma etching, photolithography with the use of liquid etching, and the formation of special contacts for decreasing losses in the waveguide. The use of a special type of structure makes it possible, even without postgrowth overgrowth with a high-resistivity material, to attain parameters satisfying requirements to heterostructures in high-quality quantum cascade lasers at maximal simplification of the entire preparation process.

Авторлар туралы

V. Mamutin

Ioffe Institute

Хат алмасуға жауапты Автор.
Email: mamutin@mail.ru
Ресей, St. Petersburg, 194021

N. Maleev

Ioffe Institute

Email: mamutin@mail.ru
Ресей, St. Petersburg, 194021

A. Vasilyev

Ioffe Institute

Email: mamutin@mail.ru
Ресей, St. Petersburg, 194021

N. Ilyinskaya

Ioffe Institute

Email: mamutin@mail.ru
Ресей, St. Petersburg, 194021

Yu. Zadiranov

Ioffe Institute

Email: mamutin@mail.ru
Ресей, St. Petersburg, 194021

A. Usikova

Ioffe Institute

Email: mamutin@mail.ru
Ресей, St. Petersburg, 194021

M. Yagovkina

Ioffe Institute

Email: mamutin@mail.ru
Ресей, St. Petersburg, 194021

Yu. Shernyakov

Ioffe Institute

Email: mamutin@mail.ru
Ресей, St. Petersburg, 194021

V. Ustinov

Ioffe Institute

Email: mamutin@mail.ru
Ресей, St. Petersburg, 194021

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