Author Details

Volokhovskiy, A. D.

Issue Section Title File
Vol 52, No 5 (2018) XXV International Symposium “Nanostructures: Physics and Technology”, Saint Petersburg, Russia, June 26–30, 2017. Nanostructure Technology Ion Synthesis: Si–Ge Quantum Dots
Vol 52, No 15 (2018) Technological Processes and Routes Using Combined Optical Techniques to Control the Shallow Etching Process