Thermal Action of an Electronic Probe with X-ray Spectral Nanoanalysis


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An algorithm for estimating the temperature of local heating with an electron-probe low-voltage nanoanalysis is proposed. The approximation of the electron energy loss function in a solid is used. Expressions were obtained for calculating the temperature distribution in a sample irradiated by a focused electron beam.

作者简介

A. Amrastanov

Kaluga State University

Email: mn@filippov.org.ru
俄罗斯联邦, Kaluga

A. Kuzin

All-Russia Research Institute of Metrological Service (VNIIMS)

Email: mn@filippov.org.ru
俄罗斯联邦, Moscow

V. Mityukhlyaev

Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)

Email: mn@filippov.org.ru
俄罗斯联邦, Moscow

E. Seregina

Kaluga Branch, Bauman Moscow State Technical University

Email: mn@filippov.org.ru
俄罗斯联邦, Kaluga

M. Stepovich

Kaluga State University

Email: mn@filippov.org.ru
俄罗斯联邦, Kaluga

P. Todua

Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)

Email: mn@filippov.org.ru
俄罗斯联邦, Moscow

M. Filippov

Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IGIC RAS)

编辑信件的主要联系方式.
Email: mn@filippov.org.ru
俄罗斯联邦, Moscow; Moscow

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