Piezoactuators and Piezomotors with Nano- and Micro-Dimensional Resolution for Test and Control Equipment
- Авторы: Bardin V.A.1, Vasil’ev V.A.1, Chernov P.S.1
-
Учреждения:
- Penza State University
- Выпуск: Том 60, № 2 (2017)
- Страницы: 166-172
- Раздел: Article
- URL: https://bakhtiniada.ru/0543-1972/article/view/246086
- DOI: https://doi.org/10.1007/s11018-017-1168-5
- ID: 246086
Цитировать
Аннотация
The state of development and production of test and control equipment with nano- and microsize resolution is investigated. The results of the development analysis are presented, the classification of piezoactuators and piezomotors of the leading manufacturers is compiled. The most characteristic structures of piezoelectric motors are considered. It is shown that stepped piezoelectric motors satisfy the requirements imposed on the actuators of test and control equipment.
Ключевые слова
Об авторах
V. Bardin
Penza State University
Автор, ответственный за переписку.
Email: opto@bk.ru
Россия, Penza
V. Vasil’ev
Penza State University
Email: opto@bk.ru
Россия, Penza
P. Chernov
Penza State University
Email: opto@bk.ru
Россия, Penza
Дополнительные файлы
