Development of Piezoelectric Dynamic Deformation Transducers Based on Hot Polarization of Lead Zirconate-Titanate Ferroelectric Films
- Авторы: Esipov Y.V.1, Biryukov S.V.1, Masychev S.I.1, Mukhortov V.M.1
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Учреждения:
- Southern Scientific Center, Russian Academy of Sciences
- Выпуск: Том 59, № 4 (2016)
- Страницы: 423-427
- Раздел: Acoustic Measurements
- URL: https://bakhtiniada.ru/0543-1972/article/view/245874
- DOI: https://doi.org/10.1007/s11018-016-0983-4
- ID: 245874
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Аннотация
A technique of hot periodic sawtooth polarization of lead zirconate-titanate ferroelectric thin films is described. The films are deposited by reactive RF sputtering on a metal foil. Work on the development of oscillator-type piezoelectric dynamic deformation sensors is discussed.
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Об авторах
Yu. Esipov
Southern Scientific Center, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: yu-yesipov@yandex.ru
Россия, Rostov-on-Don
S. Biryukov
Southern Scientific Center, Russian Academy of Sciences
Email: yu-yesipov@yandex.ru
Россия, Rostov-on-Don
S. Masychev
Southern Scientific Center, Russian Academy of Sciences
Email: yu-yesipov@yandex.ru
Россия, Rostov-on-Don
V. Mukhortov
Southern Scientific Center, Russian Academy of Sciences
Email: yu-yesipov@yandex.ru
Россия, Rostov-on-Don
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