Structure and thermal properties of heterometallic complexes for chemical vapor deposition of Cu–Pd films

详细

Novel volatile heterocomplex compounds based on copper(II) and palladium(II) fluorinated β-diketonates are studied. The crystals of the synthesized compounds are shown to be composed of 1D coordination polymers in the form of chains of alternating molecules of monometallic complexes. The crystallographic data for [Cu(hfa)₂∙Pd(zif)₂] are as follows: C₂₆H₂₂F₁₈O₁₀CuPd, P2₁/c, a = 7.9947(18) Å, b = 19.277(4) Å, c = 13.609(3) Å, β = 118.298(15)°, V = 1846.7(7) ų, Z = 2, d = 1.810 g/cm³. The thermal properties of the compounds are examined by TG-DTA and vacuum sublimation. The complexes are studied as the precursors for producing copper-palladium alloy films by chemical vapor deposition. It is demonstrated that bimetallic alloy coatings with a ratio Cu/Pd = 1:1 can be prepared from [Cu(hfa)₂∙Pd(zif)₂].