An atom probe tomography prototype with laser evaporation


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The results of development, creation, and tests of an atom-probe prototype with femtosecond laser evaporation and a position-sensitive microchannel detector with delay lines for the tomographic (3D) analysis of chemical composition of materials are presented. The atom-probe tomography is based on the principle of atom-by-atom “disassembling” of materials and projection magnification, which was previously used in field-ion microscopy, as well as the time-of-flight mass spectrometry that is applied to each evaporated ion. The prototype characteristics (mass resolution, spatial resolution, and data-collection efficiency) were demonstrated in study of tungsten.

作者简介

S. Rogozhkin

Institute for Theoretical and Experimental Physics named by A.I. Alikhanov of National Research Centre “Kurchatov Institute”; National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

编辑信件的主要联系方式.
Email: sergey.rogozhkin@itep.ru
俄罗斯联邦, Moscow, 117218; Moscow, 115409

A. Aleev

Institute for Theoretical and Experimental Physics named by A.I. Alikhanov of National Research Centre “Kurchatov Institute”; National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Email: sergey.rogozhkin@itep.ru
俄罗斯联邦, Moscow, 117218; Moscow, 115409

A. Lukyanchuk

Institute for Theoretical and Experimental Physics named by A.I. Alikhanov of National Research Centre “Kurchatov Institute”; National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Email: sergey.rogozhkin@itep.ru
俄罗斯联邦, Moscow, 117218; Moscow, 115409

A. Shutov

Institute for Theoretical and Experimental Physics named by A.I. Alikhanov of National Research Centre “Kurchatov Institute”; National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Email: sergey.rogozhkin@itep.ru
俄罗斯联邦, Moscow, 117218; Moscow, 115409

O. Raznitsyn

Institute for Theoretical and Experimental Physics named by A.I. Alikhanov of National Research Centre “Kurchatov Institute”; National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Email: sergey.rogozhkin@itep.ru
俄罗斯联邦, Moscow, 117218; Moscow, 115409

S. Kirillov

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Email: sergey.rogozhkin@itep.ru
俄罗斯联邦, Moscow, 115409

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