A Wide-Range Spectroscopic Ellipsometer with Switching of Orthogonal Polarization States Based on the MDR-41 Monochromator

Аннотация

An ellipsometer with switching of orthogonal polarization states is described, whose main feature is the use of a dual radiation source and Glan–Thompson polarization prisms from calcite with mixing and separation of orthogonally polarized beams. High reproducibility and stability of measurements of ellipsometric parameters Ψ and Δ in the spectral range of 400–2200 nm were achieved. With an integration time at each point of 2 s, the rms noise at a wavelength of 800 nm and a silicon oxide thickness of 450 nm for Ψ and Δ was 0.0025° and 0.016°, respectively. The RMS noise at a wavelength of 1800 nm and a silicon oxide thickness of 513 nm for Ψ and Δ was 0.005° and 0.03°, respectively.