Enviar artigo por via de e-mail A High-Current Electron Gun Integrated with a Magnetron Sputtering System
- Autores: Kiziridi P.P.1, Markov A.B.1, Ozur G.E.1, Padey A.G.1, Yakovlev E.V.1
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Afiliações:
- Institute of High Current Electronics, Siberian Branch
- Edição: Volume 61, Nº 3 (2018)
- Páginas: 433-435
- Seção: Laboratory Techniques
- URL: https://bakhtiniada.ru/0020-4412/article/view/160254
- DOI: https://doi.org/10.1134/S0020441218020161
- ID: 160254
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Resumo
The description and the main performance specifications are presented for a device in which a high-current electron gun and a magnetron sputtering system are integrated in a common casing. This device is efficient for surface alloying on metallic materials. It is shown that the magnetic system of the magnetron does not degrade the characteristics of an electron beam that is formed in the gun and passed through a hole in the magnetron sputtering system.
Sobre autores
P. Kiziridi
Institute of High Current Electronics, Siberian Branch
Email: info@pleiadesonline.com
Rússia, Tomsk, 634055
A. Markov
Institute of High Current Electronics, Siberian Branch
Email: info@pleiadesonline.com
Rússia, Tomsk, 634055
G. Ozur
Institute of High Current Electronics, Siberian Branch
Email: info@pleiadesonline.com
Rússia, Tomsk, 634055
A. Padey
Institute of High Current Electronics, Siberian Branch
Email: info@pleiadesonline.com
Rússia, Tomsk, 634055
E. Yakovlev
Institute of High Current Electronics, Siberian Branch
Email: info@pleiadesonline.com
Rússia, Tomsk, 634055
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