Email this article The use of lamb waves for measuring the thicknesses of thin metal films
- Authors: Tolipov K.B.1, Kleshchev D.G.1, Berezin V.M.1
-
Affiliations:
- South Ural State University
- Issue: Vol 60, No 2 (2017)
- Pages: 284-286
- Section: Laboratory Techniques
- URL: https://bakhtiniada.ru/0020-4412/article/view/159677
- DOI: https://doi.org/10.1134/S0020441217020142
- ID: 159677
Cite item
Open Access
Access granted
Subscription Access
Abstract
An experimental device that allows the determination of the thicknesses of thin metal films in the micron range is described. The method is based on the use of the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along a film on its thickness. The measurement accuracy was 8% and was virtually independent of the film thickness.
About the authors
Kh. B. Tolipov
South Ural State University
Author for correspondence.
Email: thb@susu.ac.ru
Russian Federation, Chelyabinsk, 454080
D. G. Kleshchev
South Ural State University
Email: thb@susu.ac.ru
Russian Federation, Chelyabinsk, 454080
V. M. Berezin
South Ural State University
Email: thb@susu.ac.ru
Russian Federation, Chelyabinsk, 454080
Supplementary files
