An apparatus for thermodiffusion synthesis of multicomponent semiconductor compounds

Abstract

An apparatus for thermodiffusion synthesis of multicomponent semiconductor compounds is described. CuInSe₂ polycrystalline films were obtained in the selenization temperature range 300°C ≤ Т_sel ≤ 400°C. The chemical analysis showed that the composition of the films that were synthesized at a selenization temperature of Т_sel = 400°C is stoichiometric. A series of diffraction lines that is characteristic of the chalcopyrite structure is present in the line X-ray diffraction patterns of these films.