Отправить статью по E-mail General features of interaction between copper and chlorine-containing gases
- Авторы: Dunaev A.V.1, Sitanov D.V.1, Murin D.B.1
-
Учреждения:
- Ivanovo State University of Chemistry and Technology
- Выпуск: Том 51, № 3 (2017)
- Страницы: 224-228
- Раздел: Plasma Chemistry
- URL: https://bakhtiniada.ru/0018-1439/article/view/157194
- DOI: https://doi.org/10.1134/S0018143917030031
- ID: 157194
Цитировать
Открытый доступ
Доступ предоставлен
Только для подписчиков
Аннотация
The interaction of copper with chlorine-containing gases has been studied. The resulting kinetic relationships are linear, indicating that the process occurs in a steady-state mode. It has been found that biases of −61 and −107 W provide energy of ions sufficient to maintain the effective rate of ion-stimulated desorption of the reaction products. The surface quality of the treated samples has been analyzed using atomic force microscopy.
Ключевые слова
Об авторах
A. Dunaev
Ivanovo State University of Chemistry and Technology
Автор, ответственный за переписку.
Email: dunaev-80@mail.ru
Россия, Ivanovo, 153000
D. Sitanov
Ivanovo State University of Chemistry and Technology
Email: dunaev-80@mail.ru
Россия, Ivanovo, 153000
D. Murin
Ivanovo State University of Chemistry and Technology
Email: dunaev-80@mail.ru
Россия, Ivanovo, 153000
Дополнительные файлы
